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Features
- Kinetic energy other than thermal energy can be affected to evaporating materials, by ionizing evaporating materials. By this method, migration of atoms on film surface is enhanced, and formation of high quality thin films can be achieved.
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< Cell section >
Maximum heating temp. |
1300ºC |
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Crucible capacity |
40cc |
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Heater shape |
High density / rough winding coil |
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Thermo couple |
WRe (5-26) |
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Mounting flange |
CF 152mm OD |
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Shutter |
Auto (pneumatic) |
< Ionization section >
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Accelerating voltage |
2kV, 50mA |
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Filament |
20V, 10A |
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Ionizing power supply |
100V, 100mA |
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Ion measuring mechanism and ammeter |
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