 |
Cell | ||
|
Ionization Cell Multi-Source Effusion Cell K cell K cell Si cell Crystal cell Valved Crystal Cell Side Entry Cell |
MB-3000E MB-3000M MB-3000 MB-3500 MB-3000Si MB-3000C MB-3000V OUP-3000 |
||
|
EB Gun(180° Deflection Type) | ||
| 3kW Triplet Type 3kW Single Type |
MB-5033 MB-5031 |
||
|
EB Gun(270° Deflection Type) | ||
| 5kW Octuplet Type 5kW Single Type |
MB-5258 MB-5251 |
||
|
RHEED | ||
| (High Energy Electron Diffraction) |
MB-1000 | ||
|
||
| Radial beam source | ER-1000 | |
|
Manipulator | ||
| 1inch 2inch 3inch 4inch 6inch |
MB-4100K MB-4200K MB-4300K MB-4400K MB-4600K |
||
|
|
| Sputter Source | ES-3000 |
|
Sputtering Targets |
|
Other | ||
| Beam Flux Monitor Transfer Rod Rotary Feedthrough Thickness Monitor |
EBM-1000 MB-9000 MB-8600 ETM-100R ETM-200R |
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