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Features
- This system consists of 2 chambers, which are evaporation chamber and load lock chamber.
- The substrate revolves for evaporating crucible surface of EB source in the range of }90o, and therefore this function enables tilt evaporation.
- Although this system is equipped with 5-crucible loaded EB source, it is designed in compact size.
- Since installation footprint is 2m x 2m, EB-350T can be installed in the small area.
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 Evaporation chamber |
1. Ultimate vacuum |
10-7Pa range (After baking) |
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2. chamber dimensions |
CF305mm dia. X 700mm (H) |
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3. Substrate holder |
Substrate : 2 inch in diameter
Substrate heating temp. : up to 500ºC
Cooling function equipped(cooled with by LN2) |
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4. Evaporation source |
5-crucilbe loaded 3kW EB gun
Crucible capacity : 5 pieces of 2cc |
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5. Thickness monitor
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Rate resolution: 0.1Å |
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6. Vacuum pumping system |
Turbo molecular pump and rotary pump |
| Load
lock chamber |
7. Ultimate vacuum |
10-4Pa range |
| Option |
8. Baking System |
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