Features

• Since a sample stage is revolved, consistent evaporations at an organic station and metal station can be performed under a vacuum environment.
• This chamber accommodates a front door so that materials exchange and maintenance are ease of operation.
• Organic evaporation sources and metal evaporation sources are completely partitioned by a plate, and there is no interference toward the evaporation sources.
  
• Sufficient clearance is ensured to eliminate radiant heat from evaporating sources.
  
• Evaporating sources are available from cell-type source, resistance heating boat, various types of source etc.
  
• 2 kinds of sources can be evaporated simultaneously on each station.
  
• Since this system has high extensibility, evaluation chamber, load lock chamber, glove box can be extended.