1.MBE
|
Water-Cooling MBE
|
EW-3 |
|
Water-Cooling MBE |
EW-10 |
|
Water-Cooling MBE |
EW-100 |
|
MBE |
EV-50 |
|
MBE |
EV-100 |
|
Electron Beam MBE |
EB-5 |
|
Si/Ge Thin Film Processing System |
2.Vacuum Evaporator
|
Vacuum Evaporator |
SE-5A |
|
Vacuum Evaporator |
SE-5D |
|
Vacuum Evaporator |
VX-30 |
|
Versatile Thin Film Coating Apparatus
|
VX-20
|
3.EB Evaporator
| |
Electron Beam Evaporation System |
EB-680 |
| |
Electron Beam Evaporation System |
EB-350 |
|
Electron Beam MBE |
EB-5 |
|
|
4.Sputtering
|
CVD + Multi-target Sputtering Versatile Growth System |
ES-230 |
|
UHV Multi Target Sputtering System |
ES-350SU |
| |
Sputter Apparatus |
ES-310 |
|
Sputter System (3-inch target) |
ES-360 |
|
Sputter System (6-inch target) |
ES-610 |
|
Sputter System (4-inch target) |
ESR-460 |
|
Sputtering System |
ES-460R |
|
Sputtering System |
ES-830 |
5.Organic
|
Organic Thin Film Deposition Apparatus
|
EO-5 |
|
Organic Evaporation System
|
EO-6 |
|
Organic Evaporation System
|
EO-7 |
|
OLED Deposition system |
EO-10 |
6.Variation
|
BONDING SYSTEM |
EHB-400 |
|
ROLL COATER |
ERC-200 |
|
Carbon nanotubes synthesis device |
ECN-500 |
|
Laser Ablasion |
EA-100 |
|
Etching System |
ERI-2500 |
|
Multi-Chamber System |
| |
Encapsulating system |
EHB-300 |
|
|
7.Component
|
Cell |
Ionization Cell
Multi-Source Effusion Cell
K cell
K cell
Si cell
Crystal cell
Valved Crystal Cell
Side Entry Cell
|
MB-3000E
MB-3000M
MB-3000
MB-3500
MB-3000Si
MB-3000C
MB-3000V
OUP-3000 |
| |
EB Gun(180° Deflection Type) |
| |
3kW Triplet Type
3kW Single Type |
MB-5033
MB-5031 |
| EB Gun(270° Deflection Type) |
| |
5kW Octuplet Type
5kW Single Type |
MB-5258
MB-5251 |
| RHEED |
RHEED
(High Energy Electron Diffraction)
|
MB-1000 |
|
Radial beam source |
Radial beam source
|
ER-1000 |
|
Manipulator |
Manipulator
Manipulator
Manipulator
Manipulator
Manipulator
|
MB-4100K
MB-4200K
MB-4300K
MB-4400K
MB-4600K |
|
Sputter Source
|
ES-3000 |
| Sputtering Targets |
|
|
Other |
Beam Flux Monitor
Transfer Rod
Rotary Feedthrough
Thickness Monitor
Thickness Monitor |
EBM-1000
MB-9000
MB-8600
ETM-100
ETM-200 |
|
|
8.Electron Microscopy
|
In Vivo Cryoapparatus
|
VIO-10 |
|
Ion Coater
|
IB-2/3 |
|
Ion Coater |
IB-5 |
|
Freeze Dryer |
ID-3 |
|
Quick Freezing Device |
MF-2 |
|