1.MBE
Water-Cooling MBE EW-3
Water-Cooling MBE EW-10
Water-Cooling MBE EW-100
MBE EV-50
MBE EV-100
Electron Beam MBE EB-5
Si/Ge Thin Film Processing System

2.Vacuum Evaporator
Vacuum Evaporator SE-5A
Vacuum Evaporator SE-5D
Vacuum Evaporator VX-30
Versatile Thin Film Coating Apparatus VX-20

3.EB Evaporator
Electron Beam Evaporation System EB-680
Electron Beam Evaporation System EB-350
Electron Beam MBE EB-5
4.Sputtering
CVD + Multi-target Sputtering
Versatile Growth System
ES-230
UHV Multi Target Sputtering System ES-350SU
  Sputter Apparatus ES-310
Sputter System (3-inch target) ES-360
Sputter System (6-inch target) ES-610
Sputter System (4-inch target) ESR-460
Sputtering System ES-460R
Sputtering System ES-830

5.Organic
Organic Thin Film Deposition Apparatus EO-5
Organic Evaporation System EO-6
Organic Evaporation System EO-7
OLED Deposition system EO-10

6.Variation
BONDING SYSTEM EHB-400
ROLL COATER ERC-200
Carbon nanotubes synthesis device ECN-500
Laser Ablasion EA-100
Etching System ERI-2500
Multi-Chamber System
  Encapsulating system EHB-300
7.Component
Cell Ionization Cell
Multi-Source Effusion Cell
K cell
K cell
Si cell
Crystal cell
Valved Crystal Cell
Side Entry Cell
MB-3000E
MB-3000M
MB-3000
MB-3500
MB-3000Si
MB-3000C
MB-3000V
OUP-3000
  EB Gun(180° Deflection Type)
  3kW Triplet Type
3kW Single Type
MB-5033
MB-5031
EB Gun(270° Deflection Type)
  5kW Octuplet Type
5kW Single Type
MB-5258
MB-5251
RHEED RHEED
(High Energy Electron Diffraction)
MB-1000
Radial beam source Radial beam source
ER-1000
Manipulator Manipulator
Manipulator
Manipulator
Manipulator
Manipulator
MB-4100K
MB-4200K
MB-4300K
MB-4400K
MB-4600K
Sputter Source
ES-3000
Sputtering Targets  
Other Beam Flux Monitor
Transfer Rod
Rotary Feedthrough
Thickness Monitor
Thickness Monitor
EBM-1000
MB-9000
MB-8600
ETM-100
ETM-200
8.Electron Microscopy
In Vivo Cryoapparatus VIO-10
Ion Coater IB-2/3
Ion Coater IB-5
Freeze Dryer ID-3
Quick Freezing Device MF-2