[SANYU ELECTRON CO.,LTD]

  • information service No.F2401
  • information service

    Stereoscopic Observation Device SSS-7000

  • Stereoscopic Observation Device
      To get a stereo view of a specimen with a conventional scanning electron microscope(SEM),first we have to take a pair of pictures for left and right eyes in the same field of view from two different angles. Then we observe the pictures under a steroscope to see it in stereo.
      There are two demerits in this method, It is not for real-time observation and there is dificulty to see the picture with many people at the same time.
      SSS-7000,3D-SEM have solved the problems,Attached coil deflects electron beam to show left and right eye view in TV scan rate. A monitor displays the image and synchronized LC shutter glasses separete it for left and right eyes. Many people could see it in stereo simultaneously with the glasses.
      Thus, SSS-7000, 3D-SEM gives us real-time observation and presentaion of critical dimenssion area with high quality stereoscopic image for various applications.

  • Recording and replay function of steroscopic image in 3D SEM
      The SSS-7000 can be used for technical evaluation as it can record high-quality stereoscopic images on a video cassette recorder for later replay.
      SSS-D1,3D SEM Distributor(option)
      We can show recorded stareoscopic image anywhere by hooking up SSS-D1,3D SEM Distributor between a VCR and a TV for effective technical evaluation meeting and training.

  • Height measuring function
      SSS-7000 can measure height/depth gap on specimen surface calculated from binocular parallax with non-contact proving and simple operation. Canceling image deviation between left and right eyesight at a measuring point from the operation keyboard, measured value is displayed on a LED display.

  • Equipment for related application
    (optional attatchment available)
      SDM-7501 Electron Beam 3-D Measuring Instrument
      The instrument provides non-contact topographic measurement of microarea in several nanometers with a high sensitive semiconductor sensor and electron beam proving. There is no damage on a specimen surface. An equipped PC shows a bird's -eye view and a contour map of specimen surface.

  • Operation Keyboard

      
1.POWER             Stereoscopic observation power ON/OFF
2.ACC/VOLTAGE@ @@Accelerating voltage correction
3.ANGLE             Rocking angle changeover
4.MODE CHANGEOVER   3D/LEFT/RIGHT/MIX
5.STIGMATOR         Astigmatism correction
6.ROTATION/FINE     Deflector time adjustment knob
7.MEASURE           Heigt measurement ON/OFF
8.MEASURED HEIGHT VALUE INDICATION PANEL
  • Feature
    • Dynamic stereoscopic images obtainable on a large-sized display(option)
    • High-quality stereoscopic images obtainable.
    • Effective for morphological analysis of microareas.
    • Height, and depth measurements of microareas are easy.
    • Stereoscopic images are simultaneously observable by plural people.
    • Effective for monitoring of micromanipulator operation.

  • Application Fields
    • Semiconductors
    • Metals
    • Biology
    • Minerals
    • Powders
    • Ceramics
    • Micromachining
    • Manipulation system 
    

  • Specification
Secondary electron image resolution :same as with a SEM
Specimen size movement              :same as with a SEM
Accelerating voltage                :same as with a SEM

Observation unit                    :Syncronized with TV
  Monitor                           :14-inch display
  Liquid crystal eyeglass drive system

Stereoscopic observation control unit
  Mode                              :3D/LEFT/RIGHT/MIX
  Rocking angle                     :5 steps
  Astigmatism correction            :for right and left
  Scan speed                        :TV scan
  Image recording/replay            :VTR
  Photographing                     :at L/R mode, same as with SEM
  Deflector for stereo observation  :attached to SEM(fixed)
                                    :Movable type(option)
Measuring unit
  Range                             :+/- 1000 micro m
                                      (at standard measuring point)
  Accuracy                          :+/- 3%(at 100 micro m height)*1
  Display system                    :Digital LED

Power supply                        :100VAC 10A single phase 50/60Hz

Dimention & Weight                  :Power supply unit
                                     500(W)x830(D)x750(H)mm
                                     60kg
                                     Observation unit
                                     570(W)x450(D)x1620(H)mm
    • *1Depending on SEM
    *Specification subject to change without prior notice due to performance improvement

    [SANYU ELECTRON CO.,LTD]

  • information service No.F2401
  • information service